Impurities

The interest in SiC as a large band gap semiconduc­tor for electronic applications has promoted works on typical dopants. Most of the calculations focus on hexagonal SiC, but one can reasonably assume that

Подпись: Figure 12 Energetic landscape of silicon mono- and di-interstitial in cubic SiC. Reproduced from Liao, T. (2009) Unpublished.

the results would not be very different in cubic SiC. One can find calculations dealing with boron12 ’ as an acceptor and nitrogen131132 or phosphorus133 as a donor. Other impurities were studied: transition metals,134-136 oxygen,137 important for the behavior of the SiO2/SiC interface, hydrogen,138-140 rare gases,141 and palladium.142 A systematic study of substitutional impurities has recently appeared,143 which focuses on the trends of carbon vs. silicon substitution according to the position of species in the periodic table.